Nanogallery
Nanogallery
TODAY DECEMBER 12, 2018

Electron beam sculpting of nanostructures

The figure shows an example of a suspended structure
The figure shows an example of a suspended structure "sculptured" by a focused electron beam. The experiment is done using a Scanning Electron Microscope (SEM).
The figure shows an example of a suspended structure "sculptured" by a focused electron beam. The experiment is done using a Scanning Electron Microscope (SEM). A loop is fabricated inside a trench etched deep into the SiN film. The total width of the trench is about 100 nm. The loop is thus smaller than this.


1. J. Waddell, REU project report
2. A. Bezryadin, C Dekker. "Nanofabrication of electrodes with sub-5 nm spacing for transport experiments on single molecules and metal clusters." Journal of Vacuum Science Technology B. 15, 793 (1997).

Related Links:
  • REU project report
  • The substrate is then rinsed in a photoresist developer solution, in which all parts of the photoresist exposed to light are removed
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