Nanogallery
Nanogallery
TODAY DECEMBER 3, 2022

Electron beam sculpting of nanostructures

The figure shows an example of a suspended structure
The figure shows an example of a suspended structure "sculptured" by a focused electron beam. The experiment is done using a Scanning Electron Microscope (SEM).
The figure shows an example of a suspended structure "sculptured" by a focused electron beam. The experiment is done using a Scanning Electron Microscope (SEM). A loop is fabricated inside a trench etched deep into the SiN film. The total width of the trench is about 100 nm. The loop is thus smaller than this.


1. J. Waddell, REU project report
2. A. Bezryadin, C Dekker. "Nanofabrication of electrodes with sub-5 nm spacing for transport experiments on single molecules and metal clusters." Journal of Vacuum Science Technology B. 15, 793 (1997).

Related Links:
  • REU project report
  • An optical mask is aligned over the substrate and the sample is exposed to UV light. The mask is designed to isolate a single nanotube and simultaneously create an electrode pattern for later measurements.
    Nanowerk Nanotechnology Portal
    http://www.nanowerk.com

    Nanohedron
    http://www.nanohedron.com

    Biomolecules
    http://perso.curie.fr/Simon.Sc..


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